Determination of Plasma Electron Temperature in a Pulsed Inductively Coupled Plasma (PICP) device
نویسندگان
چکیده
منابع مشابه
Electron energy distributions in a magnetized inductively coupled plasma
Sang-Heon Song, Yang Yang, Pascal Chabert, and Mark J. Kushner Department of Nuclear Engineering and Radiological Sciences, University of Michigan, 2355 Bonisteel Boulevard, Ann Arbor, Michigan 48109-2104, USA Applied Materials Inc., 974 E. Arques Avenue, M/S 81312, Sunnyvale, California 94085, USA LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France Department of Electrical ...
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In order to miniaturize a high-density, inductively coupled magnetized plasma or helicon plasma to be applied to, e.g., an industrial application and an electric propulsion field, small helicon device has been developed. The specifications of this device along with the experimental results are described. We have succeeded in generating high-density (~10(19) m(-3)) plasmas using quartz tubes wit...
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Laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) is one of the most successful direct solid sampling techniques for major, minor and trace element analysis. However, this technique still suffers from matrix dependent ablation characteristics, which makes quantification very difficult. Furthermore, the laser sampled material alters its composition from the sample to the de...
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2012
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2012.02.034